Post Fabrication Permanent Laser Trimming of Silicon Nitride Photonic Devices

We demonstrated the possibility of trimming the operating wavelength of nitrogen-rich silicon nitride racetrack resonators by exposing the devices to an ultraviolet laser. The results revealed that in a few seconds only, the resonant wavelength of fabricated devices could be tuned to any point withi...

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Published in:	2019 IEEE 2nd British and Irish Conference on Optics and Photonics (BICOP) pp. 1 - 3
Main Authors:	De Paoli, Greta, Jantzen, Senta L., Bucio, Thalia Dominguez, Skandalos, Ilias, Holmes, Christopher, Smith, Peter G. R., Milosevic, Milan M., Gardes, Frederic Y.
Format:	Conference Proceeding
Language:	English
Published:	IEEE 01-12-2019
Subjects:	nitrogen rich silicon nitride optical resonators Optical waveguides Photonics Refractive index Resonators Silicon Silicon nitride silicon photonics
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Abstract	We demonstrated the possibility of trimming the operating wavelength of nitrogen-rich silicon nitride racetrack resonators by exposing the devices to an ultraviolet laser. The results revealed that in a few seconds only, the resonant wavelength of fabricated devices could be tuned to any point within a free spectral range. This technique can also be applied to trim the response of any other silicon photonic device based on nitrogen-rich silicon nitride.
AbstractList	We demonstrated the possibility of trimming the operating wavelength of nitrogen-rich silicon nitride racetrack resonators by exposing the devices to an ultraviolet laser. The results revealed that in a few seconds only, the resonant wavelength of fabricated devices could be tuned to any point within a free spectral range. This technique can also be applied to trim the response of any other silicon photonic device based on nitrogen-rich silicon nitride.
Author	Skandalos, Ilias De Paoli, Greta Smith, Peter G. R. Jantzen, Senta L. Milosevic, Milan M. Gardes, Frederic Y. Bucio, Thalia Dominguez Holmes, Christopher
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Snippet	We demonstrated the possibility of trimming the operating wavelength of nitrogen-rich silicon nitride racetrack resonators by exposing the devices to an...
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SubjectTerms	nitrogen rich silicon nitride optical resonators Optical waveguides Photonics Refractive index Resonators Silicon Silicon nitride silicon photonics
Title	Post Fabrication Permanent Laser Trimming of Silicon Nitride Photonic Devices
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