Post Fabrication Permanent Laser Trimming of Silicon Nitride Photonic Devices

Post Fabrication Permanent Laser Trimming of Silicon Nitride Photonic Devices

We demonstrated the possibility of trimming the operating wavelength of nitrogen-rich silicon nitride racetrack resonators by exposing the devices to an ultraviolet laser. The results revealed that in a few seconds only, the resonant wavelength of fabricated devices could be tuned to any point withi...

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Bibliographic Details
Published in:2019 IEEE 2nd British and Irish Conference on Optics and Photonics (BICOP) pp. 1 - 3
Main Authors: De Paoli, Greta, Jantzen, Senta L., Bucio, Thalia Dominguez, Skandalos, Ilias, Holmes, Christopher, Smith, Peter G. R., Milosevic, Milan M., Gardes, Frederic Y.
Format: Conference Proceeding
Language:English
Published: IEEE 01-12-2019
Subjects:
nitrogen rich silicon nitride
optical resonators
Optical waveguides
Photonics
Refractive index
Resonators
Silicon
Silicon nitride
silicon photonics
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Summary:We demonstrated the possibility of trimming the operating wavelength of nitrogen-rich silicon nitride racetrack resonators by exposing the devices to an ultraviolet laser. The results revealed that in a few seconds only, the resonant wavelength of fabricated devices could be tuned to any point within a free spectral range. This technique can also be applied to trim the response of any other silicon photonic device based on nitrogen-rich silicon nitride.
DOI:10.1109/BICOP48819.2019.9059592