452 MHz Bandwidth, High Rejection 5.6 GHz UNII XBAW Coexistence Filters Using Doped AlN-on-Silicon

452 MHz Bandwidth, High Rejection 5.6 GHz UNII XBAW Coexistence Filters Using Doped AlN-on-Silicon

5.66 GHz bulk acoustic wave filters, utilizing doped aluminum nitride (AlN), are reported. The filters exhibit high -3 dB bandwidth of 452 MHz (8% fractional bandwidth), a minimum insertion loss of 1.79 dB, rejection greater than 50 dB and power handling performance (near the upper band edge) up to...

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Bibliographic Details
Published in:2019 IEEE International Electron Devices Meeting (IEDM) pp. 17.6.1 - 17.6.4
Main Authors: Shen, Y., Patel, P., Vetury, R., Shealy, J.B.
Format: Conference Proceeding
Language:English
Published: IEEE 01-12-2019
Subjects:
acoustic filters
BAW filters
bulk acoustic wave resonators
coexistence
Electromechanical devices
Mobile communication
Piezoelectric devices
RF Filters
UNII
Wide band gap semiconductors
WiFi
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Summary:5.66 GHz bulk acoustic wave filters, utilizing doped aluminum nitride (AlN), are reported. The filters exhibit high -3 dB bandwidth of 452 MHz (8% fractional bandwidth), a minimum insertion loss of 1.79 dB, rejection greater than 50 dB and power handling performance (near the upper band edge) up to 32.5 dBm. Resonators show k 2 eff of 10.24%, Qmax of 1479, and FOM of 151.
ISSN:2156-017X
DOI:10.1109/IEDM19573.2019.8993455