Ion implantation, yesterday and today

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Bibliographic Details
Published in:	Solid state technology Vol. 40; no. 5; p. 129
Main Author:	Rose, Peter H
Format:	Magazine Article
Language:	English
Published:	PennWell Publishing Corp 01-05-1997
Subjects:	History Ion implantation Semiconductor industry
Online Access:	Get full text
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ISSN:	0038-111X