Direct Deposition of CVD Diamond Layers on Top of GaN Membranes

Direct Deposition of CVD Diamond Layers on Top of GaN Membranes

We present technological issues in the deposition of diamond films on gallium nitride (GaN) membranes. Many wrinkles and thicker diamond layers were observed at the membrane center and poor quality diamond outside the membrane area. The deflection of the membranes was analyzed by a bulging method us...

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Bibliographic Details
Published in:Proceedings Vol. 56; no. 1; p. 35
Main Authors: Tibor Izsák, Gabriel Vanko, Milan Držík, Stephan Kasemann, Johann Zehetner, Marian Vojs, Bohumír Zaťko, Štěpán Potocký, Alexander Kromka
Format: Journal Article
Language:English
Published: MDPI AG 01-12-2020
Subjects:
CVD
diamond
GaN
intrinsic stress
MEMS
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Summary:We present technological issues in the deposition of diamond films on gallium nitride (GaN) membranes. Many wrinkles and thicker diamond layers were observed at the membrane center and poor quality diamond outside the membrane area. The deflection of the membranes was analyzed by a bulging method using white light interferometry. The membrane bending is discussed in the terms of temperature gradient and mismatch of thermal expansion coefficients of materials.
ISSN:2504-3900
DOI:10.3390/proceedings2020056035