Aerosol/Ink Jet Printing Technology for High-Temperature MEMS Sensors

In this work we present the results on the application of additive technology that is aerosol and ink jet technique for the fabrication of high-temperature metal oxide gas sensors. The application of thin (12 μm) alumina membrane, aerosol jet printing of Pt microheater (line width 40–60 μm), printed...

Full description

Saved in:

Bibliographic Details
Published in:	Proceedings Vol. 1; no. 4; p. 617
Main Authors:	Alexey A. Vasiliev, Anton V. Nisan, Nikolay N. Samotaev
Format:	Journal Article
Language:	English
Published:	MDPI AG 01-08-2017
Subjects:	additive technology aerosol and ink jet printing high-temperature full printed sensor metal oxide sensors thermocatalytical sensor
Online Access:	Get full text
Tags:	Add Tag No Tags, Be the first to tag this record!

Description
Summary:	In this work we present the results on the application of additive technology that is aerosol and ink jet technique for the fabrication of high-temperature metal oxide gas sensors. The application of thin (12 μm) alumina membrane, aerosol jet printing of Pt microheater (line width 40–60 μm), printed sensing layer made of nanocristalline tin dioxide based material, laser cutting of the membrane enabled the fabrication of full-printed cantilever-shaped high-temperature sensor with optimal power consumption (~80 mW at 450 °C) applicable in wireless instruments for the detection of combustible and toxic gases including methane.
ISSN:	2504-3900
DOI:	10.3390/proceedings1040617