Electrical characteristics of SiO 2 /ZrO 2 hybrid tunnel barrier for charge trap flash memory

Electrical characteristics of SiO 2 /ZrO 2 hybrid tunnel barrier for charge trap flash memory

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Bibliographic Details
Published in:Japanese Journal of Applied Physics Vol. 56; no. 8; p. 86503
Main Authors: Choi, Jaeho, Bae, Juhyun, Ahn, Jaeyoung, Hwang, Kihyun, Chung, Ilsub
Format: Journal Article
Language:English
Published: 01-08-2017
Online Access:Get full text
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Description
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.56.086503