Spectroscopic and Modeling Investigations of the Gas Phase Chemistry and Composition in Microwave Plasma Activated B 2 H 6 /CH 4 /Ar/H 2 Mixtures
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Published in: | The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory Vol. 114; no. 37; pp. 10076 - 10089 |
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Main Authors: | , , , , |
Format: | Journal Article |
Language: | English |
Published: |
23-09-2010
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Online Access: | Get full text |
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ISSN: | 1089-5639 1520-5215 |
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DOI: | 10.1021/jp104532y |