Production of Highly Homogeneous Si(100) Surfaces by H 2 O Etching:  Surface Morphology and the Role of Strain

Production of Highly Homogeneous Si(100) Surfaces by H 2 O Etching:  Surface Morphology and the Role of Strain

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Bibliographic Details
Published in:Journal of the American Chemical Society Vol. 128; no. 35; pp. 11455 - 11462
Main Authors: Faggin, Marc F., Green, Sara K., Clark, Ian T., Queeney, K. T., Hines, Melissa A.
Format: Journal Article
Language:English
Published: 01-09-2006
Online Access:Get full text
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Description
ISSN:0002-7863
1520-5126
DOI:10.1021/ja062172n