Cross-sectional scanning tunneling microscopy studies of lattice-matched InGaAs/InP quantum wells: variations in growth switching sequence

Cross-sectional scanning tunneling microscopy has been used to study variations in the source gas switching sequences in lattice-matched InGaAs/InP heterostructures grown by chemical beam epitaxy. Using finite element analysis, changes in well–barrier interface strain can be understood in terms of A...

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Bibliographic Details
Published in:Journal of crystal growth Vol. 249; no. 3; pp. 437 - 444
Main Authors: McKay, H.A., Feenstra, R.M., Poole, P.J., Aers, G.C.
Format: Journal Article
Language:English
Published: Elsevier B.V 01-03-2003
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Summary:Cross-sectional scanning tunneling microscopy has been used to study variations in the source gas switching sequences in lattice-matched InGaAs/InP heterostructures grown by chemical beam epitaxy. Using finite element analysis, changes in well–barrier interface strain can be understood in terms of As/P exchange and As memory effect in the growth chamber. Results from annealed samples indicate a greater interdiffusion of group-V species than group-III species.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
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content type line 23
ISSN:0022-0248
1873-5002
DOI:10.1016/S0022-0248(02)02224-8