Direct deposition of diamond films on steel using a three-step process

Diamond coatings were successfully deposited on tool steel substrates without using any external diffusion barrier layers. The diamond film deposition was performed in a hot filament chemical vapour deposition (HFCVD) reactor. In the first step, a high substrate temperature and a high methane percen...

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Bibliographic Details
Published in:	Diamond and related materials Vol. 15; no. 4; pp. 498 - 501
Main Authors:	Gowri, M., Li, H., Schermer, J.J., van Enckevort, W.J.P., ter Meulen, J.J.
Format:	Journal Article Conference Proceeding
Language:	English
Published:	Amsterdam Elsevier B.V 01-04-2006 Elsevier
Subjects:	Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science; rheology Diamond film Exact sciences and technology Hot filament CVD Materials science Methods of deposition of films and coatings; film growth and epitaxy Physics Steel Structure and morphology; thickness Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology Steel Diamond film Hot filament CVD Methane Hot filament chemical vapor deposition Scanning electron microscopy Nucleation Synthetic diamond High temperature Experimental study Coatings Raman spectroscopy Carbon Thin films Polycrystalline diamond CVD Tool steels Nucleation density
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