Reliable Nanofabrication of Single-Crystal Diamond Photonic Nanostructures for Nanoscale Sensing

In this manuscript, we outline a reliable procedure to manufacture photonic nanostructures from single-crystal diamond (SCD). Photonic nanostructures, in our case SCD nanopillars on thin (<1 μ m) platforms, are highly relevant for nanoscale sensing. The presented top-down procedure includes elect...

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Bibliographic Details
Published in:	Micromachines (Basel) Vol. 10; no. 11; p. 718
Main Authors:	Radtke, Mariusz, Nelz, Richard, Slablab, Abdallah, Neu, Elke
Format:	Journal Article
Language:	English
Published:	Switzerland MDPI AG 24-10-2019 MDPI
Subjects:	Adhesion Batch processes Bias Commercialization Contact angle Diamonds Electron beam lithography hsq inductively coupled-reactive ion etching (icp-rie) Nanofabrication Nanostructure Photonic crystals Plasma etching Point defects Reactive ion etching Silicon Single crystals single-crystal diamond top-down nanofabrication top-down nanofabrication electron beam lithography inductively coupled-reactive ion etching (ICP-RIE) single-crystal diamond HSQ
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