Silicon fabricated submicrometer stepper motor for microsurgical procedures

A linear stepper motor has been constructed with submicrometer step size and centimeter travel range. Silicon wafers with conventional dielectrics provide a basic electrostatic clamping mechanism, while a piezoelectric material serves as an electrical-to-mechanical power transducer. Movement is gene...

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Bibliographic Details
Published in:	Journal of microelectromechanical systems Vol. 11; no. 2; pp. 154 - 160
Main Authors:	Peichel, D., Marcus, D., Rizq, R.N., Erdman, A.G., Robbins, W.P., Polla, D.L.
Format:	Journal Article
Language:	English
Published:	New York, NY IEEE 01-04-2002 Institute of Electrical and Electronics Engineers The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects:	Applied sciences Clamps Dielectrics Electric frequency control Electric potential Electrostatic devices Electrostatics Exact sciences and technology Lead zirconate titanates Mechanical engineering. Machine design Medical applications Microelectromechanical devices Micromotors Microsurgery Motors Piezoelectric materials Piezoelectric transducers Piezoelectricity Precision engineering, watch making R&D Research & development Silicon Silicon wafers Speed control Steppers Surgery Testing Transducers Micromotor Capacitive transducer Precision engineering Linear motor Silicon Stepping machine Miniaturization PZT Motion control
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