Fabrication of a Highly NO2-Sensitive Gas Sensor Based on a Defective ZnO Nanofilm and Using Electron Beam Lithography

• Published in: Micromachines (Basel) Vol. 14; no. 10; p. 1908
• Main Authors: Feng, Zhifu, Giubertoni, Damiano, Cian, Alessandro, Valt, Matteo, Ardit, Matteo, Pedrielli, Andrea, Vanzetti, Lia, Fabbri, Barbara, Guidi, Vincenzo, Gaiardo, Andrea
• Format: Journal Article
• Language: English
• Published: Basel MDPI AG 06-10-2023; MDPI
• Subjects: Air pollution; Crystal structure; Crystallography; Electrical resistivity; Electron beam lithography; Electrons; gas sensor; Gas sensors; Gases; Hazardous materials; Internet of Things; low power consumption; MEMS; Metal oxides; nanofilm; Nitrogen dioxide; Outdoor air quality; Oxygen enrichment; Pollutants; Power consumption; Sensors; Silicon wafers; Thin films; VOCs; Volatile organic compounds; Zinc oxide; ZnO
• ISSN: 2072-666X; 2072-666X
• DOI: 10.3390/mi14101908

Hazardous substances produced by anthropic activities threaten human health and the green environment. Gas sensors, especially those based on metal oxides, are widely used to monitor toxic gases with low cost and efficient performance. In this study, electron beam lithography with two-step exposure was used to minimize the geometries of the gas sensor hotplate to a submicron size in order to reduce the power consumption, reaching 100 °C with 0.09 W. The sensing capabilities of the ZnO nanofilm against NO2 were optimized by introducing an enrichment of oxygen vacancies through N2 calcination at 650 °C. The presence of oxygen vacancies was proven using EDX and XPS. It was found that oxygen vacancies did not significantly change the crystallographic structure of ZnO, but they significantly improved the electrical conductivity and sensing behaviors of ZnO film toward 5 ppm of dry air.