MEVVA ion source development and its industrial applications at Beijing Normal University

Metal Vapor Vacuum Arc (MEVVA) ion source and ion implanter developed in Beijing Normal University (BNU) is introduced. The application in surface modification of materials with MEVVA ion implanter is reviewed.

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Bibliographic Details
Published in:	Surface & coatings technology Vol. 193; no. 1; pp. 65 - 68
Main Authors:	Liu, A.D., Zhang, H.X., Zhang, T.H.
Format:	Journal Article Conference Proceeding
Language:	English
Published:	Lausanne Elsevier B.V 01-04-2005 Elsevier
Subjects:	Cross-disciplinary physics: materials science; rheology Exact sciences and technology Industrial application Materials science Mevva ion source Other topics in materials science Physics Mevva ion source Industrial application Ontogenesis Mewa ion source Application
Online Access:	Get full text
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Description
Summary:	Metal Vapor Vacuum Arc (MEVVA) ion source and ion implanter developed in Beijing Normal University (BNU) is introduced. The application in surface modification of materials with MEVVA ion implanter is reviewed.
Bibliography:	SourceType-Scholarly Journals-2 ObjectType-Feature-2 ObjectType-Conference Paper-1 content type line 23 SourceType-Conference Papers & Proceedings-1 ObjectType-Article-3
ISSN:	0257-8972 1879-3347
DOI:	10.1016/j.surfcoat.2004.07.057