The effects of deposition parameters on the structure and properties of titanium-containing DLC films synthesized by cathodic arc plasma evaporation

• Published in: Surface & coatings technology Vol. 202; no. 22-23; pp. 5350 - 5355
• Main Authors: Tsai, Pi-Chuen, Hwang, Yen-Fei, Chiang, Jueh-Yu, Chen, Wen-Jauh
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 30-08-2008; Elsevier
• Subjects: Adhesive strength (68.35.G); Applied sciences; Carbides containing (77.84.B); Cathodic arc plasma (52.75.R, 81.15.G); Cross-disciplinary physics: materials science; rheology; Diamond-like carbon (81.05.T); Exact sciences and technology; Materials science; Mechanical properties (68.60.B); Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology; Metals. Metallurgy; Methods of deposition of films and coatings; film growth and epitaxy; Microstructure (81.40, 61.16.C, 61.16.B); Nanocomposite (61.46, 81.20); Physics; Surface treatments; Diamond-like carbon (81.05.T); Carbides containing (77.84.B); Nanocomposite (61.46, 81.20); Adhesive strength (68.35.G); Cathodic arc plasma (52.75.R, 81.15.G); Mechanical properties (68.60.B); Microstructure (81.40, 61.16.C, 61.16.B); 61.16.C; Plasma; Mechanical strength; Synthetic diamond; 81.20); Adhesive strength (68.35.G); Microstructure 81.40; Mechanical properties; Surface treatments; Diamond structure; Adhesion; Carbon; Thin films; Composite materials; Adhesive strength; Nanocomposites; Diamond-like carbon (81.05.T); Cathodic arc plasma 52.75.R; 81.15.G; Carbides containing (77.84.B); Nanocomposite (61.46; Microstructure; 61.16.B; Mechanical properties (68.60.B); Carbides
• ISSN: 0257-8972; 1879-3347
• DOI: 10.1016/j.surfcoat.2008.06.073

Titanium-containing diamond-like carbon films were deposited by mixing C+ and Ti+ plasma streams originating from cathodic arc plasma sources in argon (Ar). The deposition was processed at substrate bias voltages ranging from −50 to −300 V and a Ti target current ranging between 20 and 70 Amps. Film characteristics were investigated using Raman spectroscopy and high resolution X-ray photoelectron spectroscopy (HRXPS). The film microstructures were evaluated by using an atomic force microscope (AFM), a field emission scanning electron microscopy (FEGSEM), a glancing angle X-ray diffractometry (GAXRD) and a high-resolution transmission electron microscopy (HRTEM). Mechanical properties were investigated by using a nanoindentation tester, a ball on disc wear test and a scratch test. Raman spectra proved that the intensity of D and G bands decreased by increasing the bias voltage and Ti target currents. HRTEM results established that titanium-containing DLC films revealed a snake-skin like structure, consisting of nano scale TiC particles, comparable to GAXRD and HRXPS results. HRXPS analysis showed that the concentrations of titanium increased from 4.9 to 23.9 at.% and the C concentration proportionally decreased from 91.6 to 69.3 at.% as the Ti target current was gradually increased from 30 Amp to 70 Amp. Wear tests proved that the friction coefficient of titanium-containing DLC films were lower than that of DLC films. The scratch test also proved that the adhesive strength of Ti-DLC was significantly higher than that of conventional DLC.