Nano-mechanical properties of BCN/CN/BN multilayer films

• Published in: Diamond and related materials Vol. 16; no. 4; pp. 1441 - 1444
• Main Authors: Morant, C., Cáceres, D., Sanz, J.M., Elizalde, E.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 01-04-2007; Elsevier
• Subjects: AFM; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Defects and impurities: doping, implantation, distribution, concentration, etc; Exact sciences and technology; Hard coatings; Ion and electron beam-assisted deposition; ion plating; Ion beam assisted deposition; Materials science; Mechanical and acoustical properties; Mechanical and acoustical properties of condensed matter; Mechanical properties of nanoscale materials; Methods of deposition of films and coatings; film growth and epitaxy; Nanoindentation; Physical properties of thin films, nonelectronic; Physics; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology; AFM; Hard coatings; Ion beam assisted deposition; Nanoindentation; Atomic force microscopy; Roughness; Ion beam assisted deposition method; Sputtering; Thin films; Multilayers; Wear resistance; Depth profiles; Quantitative chemical analysis; Grain size; Nanohardness; Factor analysis; Multilayer; Boron nitrides; Ion beam sputtering; Mechanical properties; AES; Interfaces; Morphology; Hardness indentation; Hard coating
• ISSN: 0925-9635; 1879-0062
• DOI: 10.1016/j.diamond.2006.09.024

Hard coatings based on BCN/CN/BN multilayer films were deposited on Si substrates using a double ion beam sputtering system. The multilayers were obtained by sequential sputtering of BN, C and B
4C targets and simultaneous bombardment of the growing films with low energy nitrogen ions. The multilayers were characterized by Auger electron spectroscopy (AES) depth profiles in order to get a quantitative analysis of the components in the different layers. In the interface BCN/CN, Factor Analysis was used to deconvolute the different chemical states of the components and to evaluate the physical and chemical characteristics of the multilayer with respect to their practical applications. In this work, we have studied the composition, morphology, hardness and wear resistance of the films. The mean grain size of the structures of the different coatings, as well as the root mean square (RMS) surface roughness, was measured by AFM.