Effect of target properties on deposition of lithium nickel cobalt oxide thin-films using RF magnetron sputtering

• Published in: Journal of power sources Vol. 108; no. 1; pp. 239 - 244
• Main Authors: Kim, Duksu, Kim, Mun-Kyu, Son, Jong-Tae, Kim, Ho-Gi
• Format: Journal Article
• Language: English
• Published: Lausanne Elsevier B.V 01-06-2002; Elsevier Sequoia
• Subjects: Applied sciences; Cathodes; Direct energy conversion and energy accumulation; Electrical engineering. Electrical power engineering; Electrical power engineering; Electrochemical conversion: primary and secondary batteries, fuel cells; Exact sciences and technology; Lithium nickel cobaltate; Microbatteries; RF magnetron sputtering; RF magnetron sputtering; Lithium nickel cobaltate; Microbatteries; Cathodes; Cobalt oxide; Amorphous material; Electrochemical properties; Manufacturing process; Microequipment; Lithium oxide; Electric batteries; Physical properties; Nickel oxide; Radiofrequency sputtering; Thin film
• ISSN: 0378-7753; 1873-2755
• DOI: 10.1016/S0378-7753(02)00025-3

Electrochemically active lithium nickel cobalt oxide thin-film has not been fabricated until now. To fabricate stoichiometric lithium nickel cobaltate films, a sputtering target of proper composition has been synthesized via a solid-state reaction. The films are deposited by RF magnetron sputtering at room temperature. As-deposited films show an amorphous structure. By varying the deposition conditions—such as the working pressures and deposition times—thin-films with different characteristics are produced. The relationship between physical characteristics and electrochemical properties is investigated. A crystallized thin-film prepared by an annealing method displays a good discharge capacity and cycle life.