SU-8 force sensing pillar arrays for biological measurements

The generation and sensation of mechanical force plays a role in many dynamic biological processes, including touch sensation. This paper presents a two-axis micro strain gauge force sensor constructed from multiple layers of SU-8 and metal on quartz substrates. The sensor was designed to meet requi...

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Bibliographic Details

Published in:	Lab on a chip Vol. 9; no. 10; p. 1449
Main Authors:	Doll, Joseph C, Harjee, Nahid, Klejwa, Nathan, Kwon, Ronald, Coulthard, Sarah M, Petzold, Bryan, Goodman, Miriam B, Pruitt, Beth L
Format:	Journal Article
Language:	English
Published:	England 2009
Subjects:	Animals Biomechanical Phenomena - physiology Caenorhabditis elegans - physiology Computer Simulation Epoxy Compounds Equipment Design Locomotion - physiology Microfluidic Analytical Techniques - instrumentation Polymers Pressure Touch - physiology
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