Optical Reflectivity Studies of Damage in Ion Implanted Silicon

Optical Reflectivity Studies of Damage in Ion Implanted Silicon

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Bibliographic Details
Published in:Japanese Journal of Applied Physics Vol. 17; no. 5; pp. 955 - 956
Main Authors: Miyao, Masanobu, Miyazaki, Takao, Tokuyama, Takashi
Format: Journal Article
Language:English
Published: 01-01-1978
Online Access:Get full text
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Description
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.17.955