Coating deposition using vacuum arc and ablation metal plasma

An innovative concept in the development of advanced coating deposition and ion implantation method including an application of filtered DC metal plasma or ablation plasma and high-frequency short-pulsed negative bias voltage with a duty factor in the range 10–99% is considered. The regularities of...

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Bibliographic Details

Published in:	Surface & coatings technology Vol. 203; no. 17; pp. 2735 - 2738
Main Authors:	Ryabchikov, A.I., Matvienko, V.M., Stepanov, I.B.
Format:	Journal Article
Language:	English
Published:	Elsevier B.V 15-06-2009
Subjects:	Ablation plasma Immersion ion implantation Metal plasma Metal plasma Immersion ion implantation Ablation plasma
Online Access:	Get full text
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