MEMS Fluxgate Sensor Based on Liquid Casting

Compared with electroplating, liquid casting enables the rapid formation of a three-dimensional solenoid coil with a narrower line width and greater thickness, which proves advantageous in enhancing the comprehensive performance of the micro-electromechanical system (MEMS) fluxgate sensor. For this...

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Bibliographic Details
Published in:	Micromachines (Basel) Vol. 14; no. 12; p. 2159
Main Authors:	Yang, Ying, Xu, Wei, Chen, Guangyuan, Jin, Zhenhu, Wang, Dandan, Mai, Zhihong, Xing, Guozhong, Chen, Jiamin
Format:	Journal Article
Language:	English
Published:	Switzerland MDPI AG 26-11-2023
Subjects:	Amorphous alloys Annealing Closed loops Comparative analysis Crystallization Design Electromagnetism Electroplating Fe-based amorphous alloy finite element simulation Fluxgate magnetometers fluxgate sensor liquid casting Magnetic fields Manufacturing Metallic glasses micro-electro-mechanical system Microelectromechanical systems Permeability Plating Power consumption Process parameters Sensitivity Sensors Signal processing Simulation Simulation models Solenoids China Fe-based amorphous alloy finite element simulation micro-electro-mechanical system fluxgate sensor liquid casting
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