A linear air bearing stage with active magnetic preloads for ultraprecise straight motion

In this paper, we propose a linear motion stage designed with magnetically preloaded air bearings. The magnetic actuators for preloading air bearings were combined with permanent magnets and coils to adjust the air bearing clearance by actively controlling the magnetic force. The system was designed...

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Bibliographic Details
Published in:	Precision engineering Vol. 34; no. 1; pp. 186 - 194
Main Authors:	Ro, Seung-Kook, Kim, Soohyun, Kwak, Yoonkeun, Park, Chun Hong
Format:	Journal Article
Language:	English
Published:	New York, NY Elsevier Inc 2010 Elsevier
Subjects:	Active magnetic preload Air bearing stage Applied sciences Bearings, bushings, rolling bearings Drives Exact sciences and technology General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Magnetic circuit model Mechanical engineering. Machine design Motion error compensation Physics Porous air bearing Precision engineering, watch making Transducers Porous air bearing Motion error compensation Magnetic circuit model Active magnetic preload Air bearing stage Positioning Precision engineering Magnetic circuit XY stage Ball screw Magnetic force Mechanical clearance Modeling Static load Linear guide Load capacity Active system Linear motor Capacitive transducer Porous bearing Gas bearing Laser interferometer Magnetic bearing Error correction System with three degrees of freedom Permanent magnet Motion control Magnetic device
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