Dual-Mode Solidly Mounted Resonator-Based Sensor for Temperature and Humidity Detection and Discrimination

Sensors based on solidly mounted resonators (SMRs) exhibit a good set of properties, such as high sensitivity, fast response, low resolution limit and low production cost, which makes them an appealing technology for sensing applications. However, they can suffer from cross-sensitivity issues, as th...

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Published in:Sensors (Basel, Switzerland) Vol. 24; no. 9; p. 2877
Main Authors: Carmona-Cejas, José Manuel, Mirea, Teona, Hervás-García, Ricardo, Olivares, Jimena, Clement, Marta
Format: Journal Article
Language:English
Published: Switzerland MDPI AG 01-05-2024
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Abstract Sensors based on solidly mounted resonators (SMRs) exhibit a good set of properties, such as high sensitivity, fast response, low resolution limit and low production cost, which makes them an appealing technology for sensing applications. However, they can suffer from cross-sensitivity issues, as their response can be altered by undesirable ambient factors, such as temperature and humidity variations. In this work we propose a method to discriminate humidity variations from the general frequency response using an SMR specifically manufactured to operate in a dual-mode (displaying two close resonances). The two modes behave similarly towards humidity changes (-1.94 kHZ/(%RH)) for resonance one and -1.62 kHZ/(%RH) for resonance two), whereas their performance under temperature changes is significantly different, displaying 2.64 kHZ/°C for resonance one and 34.21 kHZ/°C for resonance two. This allows for the decoupling process to be carried out in a straightforward manner. Frequency response is tracked under different humidity conditions, in the -20 °C to room temperature region, proving that this behavior is reproducible in any given environment.
AbstractList Sensors based on solidly mounted resonators (SMRs) exhibit a good set of properties, such as high sensitivity, fast response, low resolution limit and low production cost, which makes them an appealing technology for sensing applications. However, they can suffer from cross-sensitivity issues, as their response can be altered by undesirable ambient factors, such as temperature and humidity variations. In this work we propose a method to discriminate humidity variations from the general frequency response using an SMR specifically manufactured to operate in a dual-mode (displaying two close resonances). The two modes behave similarly towards humidity changes (-1.94 kHZ/(%RH)) for resonance one and -1.62 kHZ/(%RH) for resonance two), whereas their performance under temperature changes is significantly different, displaying 2.64 kHZ/°C for resonance one and 34.21 kHZ/°C for resonance two. This allows for the decoupling process to be carried out in a straightforward manner. Frequency response is tracked under different humidity conditions, in the -20 °C to room temperature region, proving that this behavior is reproducible in any given environment.
Sensors based on solidly mounted resonators (SMRs) exhibit a good set of properties, such as high sensitivity, fast response, low resolution limit and low production cost, which makes them an appealing technology for sensing applications. However, they can suffer from cross-sensitivity issues, as their response can be altered by undesirable ambient factors, such as temperature and humidity variations. In this work we propose a method to discriminate humidity variations from the general frequency response using an SMR specifically manufactured to operate in a dual-mode (displaying two close resonances). The two modes behave similarly towards humidity changes (−1.94 kHZ/(%RH)) for resonance one and −1.62 kHZ/(%RH) for resonance two), whereas their performance under temperature changes is significantly different, displaying 2.64 kHZ/°C for resonance one and 34.21 kHZ/°C for resonance two. This allows for the decoupling process to be carried out in a straightforward manner. Frequency response is tracked under different humidity conditions, in the −20 °C to room temperature region, proving that this behavior is reproducible in any given environment.
Audience Academic
Author Olivares, Jimena
Mirea, Teona
Carmona-Cejas, José Manuel
Hervás-García, Ricardo
Clement, Marta
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SSID ssj0023338
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Snippet Sensors based on solidly mounted resonators (SMRs) exhibit a good set of properties, such as high sensitivity, fast response, low resolution limit and low...
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SubjectTerms Acoustics
AlN
bulk acoustic wave
Gases
Graphene
Humidity
Sensors
temperature control
Temperature effects
Thin films
Title Dual-Mode Solidly Mounted Resonator-Based Sensor for Temperature and Humidity Detection and Discrimination
URI https://www.ncbi.nlm.nih.gov/pubmed/38732983
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