The study of self-assembled ZnO nanorods grown on Si(111) by plasma-assisted molecular beam epitaxy

• Published in: Journal of crystal growth Vol. 378; pp. 466 - 469
• Main Authors: Tzou, A.J., Chien, K.F., Lai, H.Y., Ku, J.T., Lee, L., Fan, W.C., Chou, W.C.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 01-09-2013; Elsevier
• Subjects: A1. Nanostructures; A3. Molecular beam epitaxy; B1. Oxides; B1. Zinc compounds; B2. Semiconducting II–VI materials; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Cross-disciplinary physics: materials science; rheology; Crystal growth; Density; Exact sciences and technology; Materials science; Methods of crystal growth; physics of crystal growth; Methods of deposition of films and coatings; film growth and epitaxy; Methods of nanofabrication; Molecular beam epitaxy; Molecular, atomic, ion, and chemical beam epitaxy; Nanorods; Optical properties; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation; Optical properties of bulk materials and thin films; Physics; Scanning electron microscopy; Self-assembly; Silicon substrates; Theory and models of crystal growth; physics of crystal growth, crystal morphology and orientation; Zinc oxide; B1. Oxides; A3. Molecular beam epitaxy; B2. Semiconducting II–VI materials; B1. Zinc compounds; A1. Nanostructures; Scanning electron microscopy; Flux growth; Catalysts; Photoluminescence; Plasma assisted processing; B2. Semiconducting II―VI materials; Photonic device; Nanostructures; Zinc compounds; Self-assembly; II-VI semiconductors; Optical properties; Growth mechanism; Molecular beam epitaxy; Zinc oxide; Nanorod; Nanostructured materials; Nanomaterial synthesis
• ISSN: 0022-0248; 1873-5002
• DOI: 10.1016/j.jcrysgro.2012.12.137

The growth and optical properties of self-assembled ZnO nanorods grown on Si(111) substrate by plasma-assisted molecular beam epitaxy (PA-MBE) were studied. By controlling the Zn/O flux ratio, the growth of ZnO nanorods on Si(111) substrate without catalyst has been achieved. Scanning electron microscopy (SEM) shows the ZnO nanorods with various density and diameter could be controlled. Photoluminescence (PL) measurements exhibit nice optical properties. The sharp near band edge PL emission with full width at half maximum (FWHM) of about 17meV indicates that the ZnO nanorods could be used as the high efficient photonic devices.
► The growth of catalyst free self-assembled ZnO nanorods on Si(111) by plasma-assisted molecular beam epitaxy was achieved. ► The self-assembled nanorod diameter and density could be controlled by varying Zn/O flux ratio. ► The structural measurements show well crystal quality and the PL spectra shows well optical emission properties.