Fabrication and evaluation of flexible Mach-Zehnder waveguide structure embedded in a poly(dimethylsiloxane) thin film using a proton microbeam
A flexible Mach-Zehnder (MZ) optical waveguide was fabricated in a poly(dimethylsiloxane) (PDMS) film by proton beam writing (PBW). A focused 750 keV proton microbeam was used to fabricate a 40 × 20 mm2 MZ optical waveguide structure with a width of 8 µm embedded in a PDMS film for the single-mode l...
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| Published in: | Japanese Journal of Applied Physics Vol. 55; no. 6S1; pp. 6 - 06GD01 |
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| Main Authors: | , , , , , , , , , , , , |
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| Language: | English |
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The Japan Society of Applied Physics
01-06-2016
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| Abstract | A flexible Mach-Zehnder (MZ) optical waveguide was fabricated in a poly(dimethylsiloxane) (PDMS) film by proton beam writing (PBW). A focused 750 keV proton microbeam was used to fabricate a 40 × 20 mm2 MZ optical waveguide structure with a width of 8 µm embedded in a PDMS film for the single-mode light propagation of infrared (IR) laser light. The structure was measured by ion-beam-induced luminescence (IBIL) analysis and the beam fluence was optimized according to the IBIL intensity obtained from the waveguide structure. The entire structure of the MZ waveguide functioned well, confirmed by observing the near-field pattern (NFP) with a tunable IR laser (1.55 µm) for different PDMS film conditions. The optical throughput measurements for different sample configurations were obtained under continuous mechanical stress and a relatively low optical loss was observed at an inclination angle of 16°. Our results suggest that the MZ waveguide can be used for optical interlink connections under continuous mechanical stress. |
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| AbstractList | A flexible Mach-Zehnder (MZ) optical waveguide was fabricated in a poly(dimethylsiloxane) (PDMS) film by proton beam writing (PBW). A focused 750 keV proton microbeam was used to fabricate a 40 × 20 mm2 MZ optical waveguide structure with a width of 8 µm embedded in a PDMS film for the single-mode light propagation of infrared (IR) laser light. The structure was measured by ion-beam-induced luminescence (IBIL) analysis and the beam fluence was optimized according to the IBIL intensity obtained from the waveguide structure. The entire structure of the MZ waveguide functioned well, confirmed by observing the near-field pattern (NFP) with a tunable IR laser (1.55 µm) for different PDMS film conditions. The optical throughput measurements for different sample configurations were obtained under continuous mechanical stress and a relatively low optical loss was observed at an inclination angle of 16°. Our results suggest that the MZ waveguide can be used for optical interlink connections under continuous mechanical stress. A flexible Mach-Zehnder (MZ) optical waveguide was fabricated in a poly(dimethylsiloxane) (PDMS) film by proton beam writing (PBW). A focused 750 keV proton microbeam was used to fabricate a 40 x 20 mm super(2) MZ optical waveguide structure with a width of 8 [mu]m embedded in a PDMS film for the single-mode light propagation of infrared (IR) laser light. The structure was measured by ion-beam-induced luminescence (IBIL) analysis and the beam fluence was optimized according to the IBIL intensity obtained from the waveguide structure. The entire structure of the MZ waveguide functioned well, confirmed by observing the near-field pattern (NFP) with a tunable IR laser (1.55 [mu]m) for different PDMS film conditions. The optical throughput measurements for different sample configurations were obtained under continuous mechanical stress and a relatively low optical loss was observed at an inclination angle of 16[degrees]. Our results suggest that the MZ waveguide can be used for optical interlink connections under continuous mechanical stress. A flexible Mach–Zehnder (MZ) optical waveguide was fabricated in a poly(dimethylsiloxane) (PDMS) film by proton beam writing (PBW). A focused 750 keV proton microbeam was used to fabricate a 40 × 20 mm 2 MZ optical waveguide structure with a width of 8 µm embedded in a PDMS film for the single-mode light propagation of infrared (IR) laser light. The structure was measured by ion-beam-induced luminescence (IBIL) analysis and the beam fluence was optimized according to the IBIL intensity obtained from the waveguide structure. The entire structure of the MZ waveguide functioned well, confirmed by observing the near-field pattern (NFP) with a tunable IR laser (1.55 µm) for different PDMS film conditions. The optical throughput measurements for different sample configurations were obtained under continuous mechanical stress and a relatively low optical loss was observed at an inclination angle of 16°. Our results suggest that the MZ waveguide can be used for optical interlink connections under continuous mechanical stress. |
| Author | Koka, Masashi Kamiya, Tomihiro Kawabata, Shunsuke Kada, Wataru Yamada, Naoto Saruya, Ryota Miura, Kenta Satoh, Takahiro Miura, Satoshi Parajuli, Raj Kumar Matsubara, Yoshinori Akutzu, Naoki Hanaizumi, Osamu |
| Author_xml | – sequence: 1 givenname: Raj Kumar surname: Parajuli fullname: Parajuli, Raj Kumar email: t12802474@gunma-u.ac.jp organization: Gunma University Graduate School of Science and Technology, Kiryu, Gunma 376-8515, Japan – sequence: 2 givenname: Ryota surname: Saruya fullname: Saruya, Ryota organization: Gunma University Graduate School of Science and Technology, Kiryu, Gunma 376-8515, Japan – sequence: 3 givenname: Naoki surname: Akutzu fullname: Akutzu, Naoki organization: Gunma University Graduate School of Science and Technology, Kiryu, Gunma 376-8515, Japan – sequence: 4 givenname: Satoshi surname: Miura fullname: Miura, Satoshi organization: Gunma University Graduate School of Science and Technology, Kiryu, Gunma 376-8515, Japan – sequence: 5 givenname: Wataru surname: Kada fullname: Kada, Wataru email: kada.wataru@gunma-u.ac.jp organization: Gunma University Graduate School of Science and Technology, Kiryu, Gunma 376-8515, Japan – sequence: 6 givenname: Shunsuke surname: Kawabata fullname: Kawabata, Shunsuke organization: Japan Atomic Energy Agency Takasaki Advanced Radiation Research Institute, Takasaki, Gunma 370-1292, Japan – sequence: 7 givenname: Yoshinori surname: Matsubara fullname: Matsubara, Yoshinori organization: Gunma University Graduate School of Science and Technology, Kiryu, Gunma 376-8515, Japan – sequence: 8 givenname: Takahiro surname: Satoh fullname: Satoh, Takahiro organization: Japan Atomic Energy Agency Takasaki Advanced Radiation Research Institute, Takasaki, Gunma 370-1292, Japan – sequence: 9 givenname: Masashi surname: Koka fullname: Koka, Masashi organization: Japan Atomic Energy Agency Takasaki Advanced Radiation Research Institute, Takasaki, Gunma 370-1292, Japan – sequence: 10 givenname: Naoto surname: Yamada fullname: Yamada, Naoto organization: Japan Atomic Energy Agency Takasaki Advanced Radiation Research Institute, Takasaki, Gunma 370-1292, Japan – sequence: 11 givenname: Tomihiro surname: Kamiya fullname: Kamiya, Tomihiro organization: Japan Atomic Energy Agency Takasaki Advanced Radiation Research Institute, Takasaki, Gunma 370-1292, Japan – sequence: 12 givenname: Kenta surname: Miura fullname: Miura, Kenta organization: Gunma University Graduate School of Science and Technology, Kiryu, Gunma 376-8515, Japan – sequence: 13 givenname: Osamu surname: Hanaizumi fullname: Hanaizumi, Osamu organization: Gunma University Graduate School of Science and Technology, Kiryu, Gunma 376-8515, Japan |
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| Snippet | A flexible Mach-Zehnder (MZ) optical waveguide was fabricated in a poly(dimethylsiloxane) (PDMS) film by proton beam writing (PBW). A focused 750 keV proton... A flexible Mach–Zehnder (MZ) optical waveguide was fabricated in a poly(dimethylsiloxane) (PDMS) film by proton beam writing (PBW). A focused 750 keV proton... |
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| SubjectTerms | Embedded structures Lasers Microbeams Optical waveguides Proton beams Silicone resins Stresses Waveguides |
| Title | Fabrication and evaluation of flexible Mach-Zehnder waveguide structure embedded in a poly(dimethylsiloxane) thin film using a proton microbeam |
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