The structure and toughness of TiN coatings prepared by modulated pulsed power magnetron sputtering

Titanium nitride (TiN) coatings were prepared on different substrates (Si wafer, M2 steel, glass) by modulated pulsed power (MPP) sputtering and continuous dc magnetron sputtering (dcMS). The structure and properties were characterized using X-ray diffraction (XRD), scanning electron microscopy (SEM...

Full description

Bibliographic Details

Published in:	Vacuum Vol. 125; pp. 165 - 169
Main Authors:	Li, Hongtao, Liu, Yanjie, Jiang, Bailing, Kan, Jinfeng, Liu, Zheng
Format:	Journal Article
Language:	English
Published:	Elsevier Ltd 01-03-2016
Subjects:	Coatings Cracks Fracture toughness High speed tool steels Magnetron sputtering Microindentation MPP sputtering Scanning electron microscopy Silicon substrates TiN coatings Titanium nitride Toughness Toughness MPP sputtering TiN coatings
Online Access:	Get full text
Tags:	Add Tag No Tags, Be the first to tag this record!