Semiconductor micro- and nanoneedles for microinjections and ink-jet printing

• Published in: Microelectronic engineering Vol. 67; pp. 782 - 788
• Main Authors: Prinz, A.V., Prinz, V.Ya, Seleznev, V.A.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01-06-2003
• Subjects: Microfluid; Microinjection; Microneedle; Nanotube; Semiconductor thin film; Microinjection; Microfluid; Semiconductor thin film; Microneedle; Nanotube
• ISSN: 0167-9317; 1873-5568
• DOI: 10.1016/S0167-9317(03)00139-4

For the first time, semiconductor micro- and nanoneedles for microinjections into living cell and ink-jet printing have been fabricated. In the fabrication process, novel methods permitting directional rolling of lithographically predefined strained heterofilms into tubes and preparation of tubes protruding over substrate edges (needles) are employed. The fabricated InGaAs/GaAs and Si/GeSi needles are shown to be mechanically strong enough to allow multiple punching of thick-walled plant cells. The proposed technique is compatible with the integrated-circuit technology and can be applied to many types of strained heterostructures.