A micromachined poly(vinylidene fluoride-trifluoroethylene) transducer for pulse-echo ultrasound applications

A process for manufacturing epoxy-backed integrated poly(vinylidene fluoride-trifluoroethylene) [P(VDF-TrFE)] transducers using standard microfabrication techniques is reported. The P(VDF-TrFE) is spin-cast over a silicon membrane, which is backfilled with epoxy to yield a wide-band, half-wavelength...

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Bibliographic Details
Published in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control Vol. 43; no. 2; pp. 257 - 262
Main Authors: Sleva, M.Z., Briggs, R.D., Hunt, W.D.
Format: Journal Article
Language:English
Published: New York, NY IEEE 01-03-1996
Institute of Electrical and Electronics Engineers
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Summary:A process for manufacturing epoxy-backed integrated poly(vinylidene fluoride-trifluoroethylene) [P(VDF-TrFE)] transducers using standard microfabrication techniques is reported. The P(VDF-TrFE) is spin-cast over a silicon membrane, which is backfilled with epoxy to yield a wide-band, half-wavelength (/spl lambda//2)-resonant device suitable for pulse-echo use. The main advantages of the fabrication process are the ability to build several devices at a time on a single wafer and the potential for integrating electronics on the same substrate with the transducer. Twelve 31-MHz 2-mm diameter transducers were fabricated on a 2-in diameter silicon wafer. A pulse length of about 100 ns was achieved with a sample device, which exhibited a dynamic range of 40 dB and an insertion loss of 48 dB. The axial resolution of the transducer in healthy vascular tissue was estimated to be 79 /spl mu/m.
Bibliography:ObjectType-Article-2
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ISSN:0885-3010
1525-8955
DOI:10.1109/58.485951