Enhancement of the Transmission Performance of Piezoelectric Micromachined Ultrasound Transducers by Vibration Mode Optimization

• Published in: Micromachines (Basel) Vol. 13; no. 4; p. 596
• Main Authors: Li, Penglu, Fan, Zheng, Duan, Xiaoya, Cui, Danfeng, Zang, Junbin, Zhang, Zengxing, Xue, Chenyang
• Format: Journal Article
• Language: English
• Published: Switzerland MDPI AG 10-04-2022; MDPI
• Subjects: Acoustics; Aluminum; Biomedical materials; CMOS; Design; Diaphragms (mechanics); Electrodes; Energy; FEM; Finite element method; high frequency; Materials selection; Medical equipment; Medical imaging; Micromachining; Molybdenum; Optimization; Piezoelectricity; PMUT; Sensitivity; Sensors; Shape effects; Silicon devices; Silicon substrates; Three dimensional models; Transducers; Ultrasonic imaging; Ultrasonic transducers; vibration diaphragm; Vibration mode; Zinc oxides; PMUT; high frequency; vibration diaphragm; FEM
• ISSN: 2072-666X; 2072-666X
• DOI: 10.3390/mi13040596

Ultrasound is widely used in industry and the agricultural, biomedical, military, and other fields. As key components in ultrasonic applications, the characteristic parameters of ultrasonic transducers fundamentally determine the performance of ultrasonic systems. High-frequency ultrasonic transducers are small in size and require high precision, which puts forward higher requirements for sensor design, material selection, and processing methods. In this paper, a three-dimensional model of a high-frequency piezoelectric micromachined ultrasonic transducer (PMUT) is established based on the finite element method (FEM). This 3D model consists of a substrate, a silicon device layer, and a molybdenum-aluminum nitride-molybdenum (Mo-AlN-Mo) sandwich piezoelectric layer. The effect of the shape of the transducer's vibrating membrane on the transmission performance was studied. Through a discussion of the parametric scanning of the key dimensions of the diaphragms of the three structures, it was concluded that the fundamental resonance frequency of the hexagonal diaphragm was higher than that of the circle and the square under the same size. Compared with the circular diaphragm, the sensitivity of the square diaphragm increased by 8.5%, and the sensitivity of the hexagonal diaphragm increased by 10.7%. The maximum emission sound-pressure level of the hexagonal diaphragm was 6.6 times higher than that of the circular diaphragm. The finite element results show that the hexagonal diaphragm design has great advantages for improving the transmission performance of the high-frequency PMUT.