Ultrasoft-X-ray emission spectroscopy using a newly designed wavelength-dispersive spectrometer attached to a transmission electron microscope

• Published in: Journal of electron microscopy Vol. 61; no. 1; pp. 1 - 8
• Main Authors: Terauchi, Masami, Takahashi, Hideyuki, Handa, Nobuo, Murano, Takanori, Koike, Masato, Kawachi, Tetsuya, Imazono, Takashi, Koeda, Masaru, Nagano, Tetsuya, Sasai, Hiroyuki, Oue, Yuki, Yonezawa, Zeno, Kuramoto, Satoshi
• Format: Journal Article
• Language: English
• Published: Oxford Oxford University Press 01-02-2012; Oxford Publishing Limited (England)
• Subjects: Aluminum; Diffraction gratings; Electron microscopy; Emission spectra; Emission spectroscopy; Emissions; Gratings (spectra); Magnesium; Spectrometers; Spectrum analysis; Transmission electron microscopy; ultrasoft-X-ray emission; Li-K emission; wavelength-dispersive spectroscopy
• ISSN: 0022-0744; 1477-9986; 2050-5701
• DOI: 10.1093/jmicro/dfr076

A new grating (JS50XL) for ultrasoft-X-ray spectroscopy in an energy range 50-200 eV was designed, manufactured and tested. A spectrometer composed of the grating and a multi-channel plate detector was constructed. At the low-energy end of this spectrometer, a sharp Fermi edge of Mg-L emission was observed at 49.5 eV with an energy resolution of 0.15 eV. Li-K emission spectra were obtained from metal-Li, surface-oxidized metal-Li and 5% Li-Al. Relative energy shifts observed in Al-L emission spectra of Al, AlN and MgAl2O4 were explained by shifts in core binding energies (chemical shift) and bandgap energies of those materials. Si-L emissions from Si, SiC and SiO2 (quartz) and P-L emissions from GaP and InP were presented. Furthermore, the grating was tilted to extend the lower limit of detection energy to 32 eV, and the whole intensity distribution of Mg-L emission was successfully obtained. These ultrasoft-X-ray emission spectra show a successful extension to lower-energy range using the new soft-X-ray emission spectroscopy instrument in electron microscopy.