Determination of pore size distribution in thin films by ellipsometric porosimetry

We show that ellipsometric porosimetry can be used for the measurement of the pore size distribution in thin porous films deposited on top of any smooth solid substrate. In this method, in situ ellipsometry is used to determine the amount of adsorptive, which is adsorbed/condensed in the film. Chang...

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Bibliographic Details

Published in:	Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Vol. 18; no. 3; pp. 1385 - 1391
Main Authors:	Baklanov, M. R., Mogilnikov, K. P., Polovinkin, V. G., Dultsev, F. N.
Format:	Journal Article
Language:	English
Published:	01-05-2000
Subjects:	Ellipsometry Pore size Porosimeters Refractive index Substrates Thin films
Online Access:	Get full text
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