Two-Dimensional Multi-Channel Neural Probes With Electronic Depth Control

• Published in: IEEE transactions on biomedical circuits and systems Vol. 5; no. 5; pp. 403 - 412
• Main Authors: Torfs, T., Aarts, A. A. A., Erismis, M. A., Aslam, J., Yazicioglu, R. F., Seidl, K., Herwik, S., Ulbert, I., Dombovari, B., Fiath, R., Kerekes, B. P., Puers, R., Paul, O., Ruther, P., Van Hoof, C., Neves, H. P.
• Format: Journal Article
• Language: English
• Published: United States IEEE 01-10-2011; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: CMOS integrated circuits; Complementary-metal-oxide-semiconductor (CMOS) integrated circuits; Contacts; Electrodes; Impedance; implantable biomedical devices; multi-electrode arrays; neural probes; Probes; Shafts; Switches
• ISSN: 1932-4545; 1940-9990
• DOI: 10.1109/TBCAS.2011.2162840

This paper presents multi-electrode arrays for in vivo neural recording applications incorporating the principle of electronic depth control (EDC), i.e., the electronic selection of recording sites along slender probe shafts independently for multiple channels. Two-dimensional (2D) arrays were realized using a commercial 0.5- μm complementary-metal-oxide-semiconductor (CMOS) process for the EDC circuits combined with post-CMOS micromachining to pattern the comb-like probes and the corresponding electrode metallization. A dedicated CMOS integrated front-end circuit was developed for pre-amplification and multiplexing of the neural signals recorded using these probes.