Intermodulation in capacitively coupled microelectromechanical filters

• Published in: IEEE electron device letters Vol. 26; no. 5; pp. 289 - 291
• Main Authors: Alastalo, A.T., Kaajakari, V.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01-05-2005; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Applied sciences; Communication systems; Computer simulation; Devices; Electronics; Exact sciences and technology; filter distortion; Filtering; filters; Frequency; Intermodulation; Intermodulation distortion; Mathematical analysis; Mathematical models; Micro- and nanoelectromechanical devices (mems/nems); Microcavities; microelectromechanical devices; Micromechanical devices; Passband; Resonator filters; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Springs; Transducers; Voltage; Intermodulation distortion; Communication systems; microelectromechanical devices; Third order; Analytical method; Numerical simulation; Capacitive coupling; Intermodulation; filters; filter distortion; Microelectromechanical device; Harmonic balance
• ISSN: 0741-3106; 1558-0563
• DOI: 10.1109/LED.2005.846589

A compact model for third-order intermodulation in capacitively coupled microelectromechanical filters is derived. A simple expression for the input third-order intercept point is given. This is valuable in designing micromechanical filters, for example, for communication applications. The validity of the analytic model is verified with numerical harmonic-balance simulations and experimental measurements.