Modeling of dynamical processes in laser ablation
Various physics and computational approaches have been developed to globally characterize phenomena important for film growth by pulsed-laser deposition of materials. These include thermal models of laser-solid target interactions that initiate the vapor plume, plume ionization and heating through l...
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Published in: | Applied surface science Vol. 96-98; pp. 14 - 23 |
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Main Authors: | , , , , , , |
Format: | Journal Article Conference Proceeding |
Language: | English |
Published: |
Amsterdam
Elsevier B.V
01-04-1996
Elsevier Science |
Subjects: | |
Online Access: | Get full text |
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Summary: | Various physics and computational approaches have been developed to globally characterize phenomena important for film growth by pulsed-laser deposition of materials. These include thermal models of laser-solid target interactions that initiate the vapor plume, plume ionization and heating through laser absorption beyond local thermodynamic equilibrium mechanisms, hydrodynamic and collisional descriptions of plume transport, and molecular dynamics models of the interaction of plume particles with the deposition substrate. |
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ISSN: | 0169-4332 1873-5584 |
DOI: | 10.1016/0169-4332(95)00372-X |