A super-resolution Fresnel zone plate and photon sieve

• Published in: Optics and lasers in engineering Vol. 48; no. 7; pp. 760 - 765
• Main Authors: Jia, Jia, Xie, Changqing, Liu, Ming, Wan, Lixi
• Format: Journal Article
• Language: English
• Published: Kidlington Elsevier Ltd 01-07-2010; Elsevier
• Subjects: Beams (radiation); Diffraction; Diffractive optics; Exact sciences and technology; Filters, zone plates, and polarizers; Fresnel zone plate; Fresnel zones; Fundamental areas of phenomenology (including applications); Lithography; Optical elements, devices, and systems; Optics; Photon sieve; Photons; Physics; Polystyrene resins; Sieves; Soft x-rays; Super-resolution; Fresnel zone plate; Super-resolution; Diffractive optics; Photon sieve; High-power lasers; Lithography; Superresolution; Fresnel zone; Zone plates; X radiation; Diffractive optical elements; Beam shaping; ps range; Phase mask
• ISSN: 0143-8166; 1873-0302
• DOI: 10.1016/j.optlaseng.2010.03.007

Realizing a smaller or sharper diffractive center spot is a valuable research aim in soft X-ray focus and other related research applications. Fresnel zone plates (FZP) and photon sieves (PS) are often used to focus the X-rays or other wavelength light at present. Here, we show that combination of a super-resolution phase mask (SPM) and an FZP (or PS) as one diffractive optical element can realize a smaller or sharper diffractive center spot without significantly increasing the fabrication difficulty. All these diffractive phase elements can be applied to beam shaping, mask-less lithography, energy congregation in high power lasers, soft X-rays focus, and any other field that requires a smaller or sharper diffractive center spot.