Plasma generation in silicon-based inductive grid arrays

Selective illumination of a silicon wafer can be used for the construction of non-permanent inductive grids. A numerical model is used for the calculation of plasma density distribution in silicon as a function of time. Some indicative results on the microwave properties of the device are presented.

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Published in:	Optics and lasers in engineering Vol. 47; no. 11; pp. 1195 - 1198
Main Authors:	Kontogeorgos, A.A., Korfiatis, D.P., Thoma, K.A.Th, Vardaxoglou, J.C.
Format:	Journal Article
Language:	English
Published:	Kidlington Elsevier Ltd 01-11-2009 Elsevier
Subjects:	Electron–hole plasma Exact sciences and technology Grid arrays Optical control of microwaves Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma production and heating Plasma production and heating by laser beams Grid arrays Electron–hole plasma Optical control of microwaves Electron hole plasma Microwave radiation Laser-produced plasma Theoretical study Numerical method Silicon Electron-hole plasma
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Abstract	Selective illumination of a silicon wafer can be used for the construction of non-permanent inductive grids. A numerical model is used for the calculation of plasma density distribution in silicon as a function of time. Some indicative results on the microwave properties of the device are presented.
AbstractList	Selective illumination of a silicon wafer can be used for the construction of non-permanent inductive grids. A numerical model is used for the calculation of plasma density distribution in silicon as a function of time. Some indicative results on the microwave properties of the device are presented.
Author	Kontogeorgos, A.A. Vardaxoglou, J.C. Thoma, K.A.Th Korfiatis, D.P.
Author_xml	– sequence: 1 givenname: A.A. surname: Kontogeorgos fullname: Kontogeorgos, A.A. organization: Cavendish Laboratory, University of Cambridge, Cambridge CB3 0HE, UK – sequence: 2 givenname: D.P. surname: Korfiatis fullname: Korfiatis, D.P. email: korfiat@physics.upatras.gr organization: Physics Department, University of Patras, Rio, Patras, Hellas, Greece – sequence: 3 givenname: K.A.Th surname: Thoma fullname: Thoma, K.A.Th organization: Physics Department, University of Patras, Rio, Patras, Hellas, Greece – sequence: 4 givenname: J.C. surname: Vardaxoglou fullname: Vardaxoglou, J.C. organization: Department of Electronic and Electrical Engineering, Loughborough University, Loughborough, Leicestershire, LE11 3TU, UK
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Cites_doi	10.1002/mop.20622 10.1049/el:20030570 10.1109/LMWC.2005.855372 10.1109/TAP.2004.838795 10.1002/mop.11188 10.1049/el:19961557 10.1109/22.775484 10.1109/JLT.2006.872284 10.1088/0022-3727/40/21/047 10.1002/mop.21232
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References	Bhadauria (bib8) 2003; 39 Gary, Arnould, Vilcot (bib9) 2006; 24 El Khaldi, Podevin, Vilcot (bib5) 2005; 47 Lockyer, Vardaxoglou, Kearney (bib2) 1999; 47 Vardaxoglou (bib11) 1997 Korfiatis, Thoma, Vardaxoglou (bib10) 2007; 40 Mias (bib3) 2003; 39 Mias (bib4) 2005; 15 Chambers, Tennant (bib7) 2005; 53 Vardaxoglou (bib1) 1996; 32 Fusco, Nair (bib6) 2005; 44 El Khaldi (10.1016/j.optlaseng.2009.06.006_bib5) 2005; 47 Fusco (10.1016/j.optlaseng.2009.06.006_bib6) 2005; 44 Chambers (10.1016/j.optlaseng.2009.06.006_bib7) 2005; 53 Bhadauria (10.1016/j.optlaseng.2009.06.006_bib8) 2003; 39 Vardaxoglou (10.1016/j.optlaseng.2009.06.006_bib11) 1997 Korfiatis (10.1016/j.optlaseng.2009.06.006_bib10) 2007; 40 Vardaxoglou (10.1016/j.optlaseng.2009.06.006_bib1) 1996; 32 Mias (10.1016/j.optlaseng.2009.06.006_bib3) 2003; 39 Mias (10.1016/j.optlaseng.2009.06.006_bib4) 2005; 15 Gary (10.1016/j.optlaseng.2009.06.006_bib9) 2006; 24 Lockyer (10.1016/j.optlaseng.2009.06.006_bib2) 1999; 47
References_xml	– volume: 47 start-page: 570 year: 2005 end-page: 573 ident: bib5 article-title: Microstrip parallel line coupler to perform broadband optically controlled phase-shifting publication-title: Microwave Opt Technol Lett contributor: fullname: Vilcot – volume: 40 start-page: 6803 year: 2007 end-page: 6808 ident: bib10 article-title: Conditions for femtosecond laser melting of silicon publication-title: J Phys D: Appl Phys contributor: fullname: Vardaxoglou – volume: 39 start-page: 271 year: 2003 end-page: 276 ident: bib8 article-title: Optically controlled microstrip load and stub on silicon substrate publication-title: Microwave Opt Technol Lett contributor: fullname: Bhadauria – volume: 53 start-page: 394 year: 2005 end-page: 403 ident: bib7 article-title: A smart radar absorber based on the phase-switched screen publication-title: IEEE Trans Antennas Propag contributor: fullname: Tennant – year: 1997 ident: bib11 article-title: Frequency selective surfaces: analysis and design contributor: fullname: Vardaxoglou – volume: 47 start-page: 1391 year: 1999 end-page: 1397 ident: bib2 article-title: Transmission through optically generated inductive grid arrays publication-title: IEEE Trans Microwave Theory Tech contributor: fullname: Kearney – volume: 15 start-page: 570 year: 2005 end-page: 572 ident: bib4 article-title: Varactor-tunable frequency selective surface with resistive-lumped-element biasing grids publication-title: IEEE Microwave Wireless Components contributor: fullname: Mias – volume: 39 start-page: 850 year: 2003 end-page: 852 ident: bib3 article-title: Waveguide and free-space demonstration of tunable frequency selective surface publication-title: Electron Lett contributor: fullname: Mias – volume: 32 start-page: 2345 year: 1996 end-page: 2346 ident: bib1 article-title: Optical switching of frequency selective surface bandpass response publication-title: Electron Lett contributor: fullname: Vardaxoglou – volume: 44 start-page: 318 year: 2005 end-page: 320 ident: bib6 article-title: Wafer-scale silicon optically controlled absorber/reflector surface publication-title: Microwave Opt Technol Lett contributor: fullname: Nair – volume: 24 start-page: 2163 year: 2006 end-page: 2170 ident: bib9 article-title: Semi-analytical modeling and analysis in three dimensions of the optical carrier injection and diffusion in a semiconductor substrate publication-title: J Lightwave Technol contributor: fullname: Vilcot – volume: 44 start-page: 318 year: 2005 ident: 10.1016/j.optlaseng.2009.06.006_bib6 article-title: Wafer-scale silicon optically controlled absorber/reflector surface publication-title: Microwave Opt Technol Lett doi: 10.1002/mop.20622 contributor: fullname: Fusco – year: 1997 ident: 10.1016/j.optlaseng.2009.06.006_bib11 contributor: fullname: Vardaxoglou – volume: 39 start-page: 850 year: 2003 ident: 10.1016/j.optlaseng.2009.06.006_bib3 article-title: Waveguide and free-space demonstration of tunable frequency selective surface publication-title: Electron Lett doi: 10.1049/el:20030570 contributor: fullname: Mias – volume: 15 start-page: 570 year: 2005 ident: 10.1016/j.optlaseng.2009.06.006_bib4 article-title: Varactor-tunable frequency selective surface with resistive-lumped-element biasing grids publication-title: IEEE Microwave Wireless Components doi: 10.1109/LMWC.2005.855372 contributor: fullname: Mias – volume: 53 start-page: 394 year: 2005 ident: 10.1016/j.optlaseng.2009.06.006_bib7 article-title: A smart radar absorber based on the phase-switched screen publication-title: IEEE Trans Antennas Propag doi: 10.1109/TAP.2004.838795 contributor: fullname: Chambers – volume: 39 start-page: 271 year: 2003 ident: 10.1016/j.optlaseng.2009.06.006_bib8 article-title: Optically controlled microstrip load and stub on silicon substrate publication-title: Microwave Opt Technol Lett doi: 10.1002/mop.11188 contributor: fullname: Bhadauria – volume: 32 start-page: 2345 year: 1996 ident: 10.1016/j.optlaseng.2009.06.006_bib1 article-title: Optical switching of frequency selective surface bandpass response publication-title: Electron Lett doi: 10.1049/el:19961557 contributor: fullname: Vardaxoglou – volume: 47 start-page: 1391 year: 1999 ident: 10.1016/j.optlaseng.2009.06.006_bib2 article-title: Transmission through optically generated inductive grid arrays publication-title: IEEE Trans Microwave Theory Tech doi: 10.1109/22.775484 contributor: fullname: Lockyer – volume: 24 start-page: 2163 year: 2006 ident: 10.1016/j.optlaseng.2009.06.006_bib9 article-title: Semi-analytical modeling and analysis in three dimensions of the optical carrier injection and diffusion in a semiconductor substrate publication-title: J Lightwave Technol doi: 10.1109/JLT.2006.872284 contributor: fullname: Gary – volume: 40 start-page: 6803 year: 2007 ident: 10.1016/j.optlaseng.2009.06.006_bib10 article-title: Conditions for femtosecond laser melting of silicon publication-title: J Phys D: Appl Phys doi: 10.1088/0022-3727/40/21/047 contributor: fullname: Korfiatis – volume: 47 start-page: 570 year: 2005 ident: 10.1016/j.optlaseng.2009.06.006_bib5 article-title: Microstrip parallel line coupler to perform broadband optically controlled phase-shifting publication-title: Microwave Opt Technol Lett doi: 10.1002/mop.21232 contributor: fullname: El Khaldi
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SubjectTerms	Electron–hole plasma Exact sciences and technology Grid arrays Optical control of microwaves Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma production and heating Plasma production and heating by laser beams
Title	Plasma generation in silicon-based inductive grid arrays
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