The Effect of Plasma Drift and of Inadequate Reference Electrode on Electron Energy Distribution Measurements by an Electrostatic Probe

The Effect of Plasma Drift and of Inadequate Reference Electrode on Electron Energy Distribution Measurements by an Electrostatic Probe

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Bibliographic Details
Published in:Japanese Journal of Applied Physics Vol. 18; no. 7; pp. 1407 - 1408
Main Authors: Chang, Jen-Shih, Keskinen, K., Hobson, R. M.
Format: Journal Article
Language:English
Published: 01-01-1979
Online Access:Get full text
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Description
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.18.1407