High spatial resolution 3D analysis of materials using gallium focused ion beam secondary ion mass spectrometry (FIB SIMS)

The sharpness and high density of focused ion beams (FIB) enable micromachining of materials. When a gallium FIB is used as a primary beam for secondary ion mass spectrometry (SIMS), 2D analysis with submicron resolution is easily achieved. In situ combination of micromachining and high spatial reso...

Full description

Bibliographic Details

Published in:	Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 136; pp. 1028 - 1033
Main Authors:	Tomiyasu, Bunbunoshin, Fukuju, Isamu, Komatsubara, Hirotaka, Owari, Masanori, Nihei, Yoshimasa
Format:	Journal Article
Language:	English
Published:	Elsevier B.V 01-03-1998
Subjects:	3D analysis Depth profiling Focused ion beam Individual particle analysis Secondary ion mass spectrometry 3D analysis 81.70.Jb Focused ion beam Individual particle analysis Secondary ion mass spectrometry 82.80.Ms Depth profiling
Online Access:	Get full text
Tags:	Add Tag No Tags, Be the first to tag this record!