SEM study of defects in PVD hard coatings using focused ion beam milling

• Published in: Surface & coatings technology Vol. 202; no. 11; pp. 2302 - 2305
• Main Authors: Panjan, P., Kek Merl, D., Zupanič, F., Čekada, M., Panjan, M.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Lausanne Elsevier B.V 25-02-2008; Elsevier
• Subjects: 3D stylus profilometry; AFM; Applied sciences; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Focused ion milling; Materials science; Metals. Metallurgy; Physics; Production techniques; PVD hard coating; SEM; Surface treatment; Surface treatments; AFM; SEM; 3D stylus profilometry; PVD hard coating; Focused ion milling; Atomic force microscopy; Scanning electron microscopy; Physical vapor deposition; Ion beam; Surface treatments; Hard coating; Defects
• ISSN: 0257-8972; 1879-3347
• DOI: 10.1016/j.surfcoat.2007.09.033

Hard coatings CrN, TiAlN and multilayer CrN/TiAlN were prepared on different substrates (HSS, D2 tool steels, Al-alloy) by thermoionic arc ion plating and by sputtering. The defects incorporated into the coating were studied by four techniques: top view conventional and field-emission SEM, cross-section SEM, AFM and stylus profilometry. As a specifically useful tool to study internal structure of the defect, we applied focused ion beam milling system, which is built in a conventional scanning electron microscope. By ion beam milling we prepared cross-sections through the defects.