High holding current SCRs (HHI-SCR) for ESD protection and latch-up immune IC operation

This paper presents a novel Silicon Controlled Rectifier (SCR) for power line and local I/O ESD protection. The High holding current SCRs (HHI-SCR) exhibits a dual ESD clamp characteristic: low-current high-voltage clamping and high-current low-voltage clamping. These operation modes enable latch-up...

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Bibliographic Details
Published in:Microelectronics and reliability Vol. 43; no. 7; pp. 993 - 1000
Main Authors: Mergens, Markus P.J., Russ, Christian C., Verhaege, Koen G., Armer, John, Jozwiak, Phillip C., Mohn, Russ
Format: Journal Article
Language:English
Published: Elsevier Ltd 01-07-2003
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Summary:This paper presents a novel Silicon Controlled Rectifier (SCR) for power line and local I/O ESD protection. The High holding current SCRs (HHI-SCR) exhibits a dual ESD clamp characteristic: low-current high-voltage clamping and high-current low-voltage clamping. These operation modes enable latch-up immune normal operation as well as superior full chip ESD protection. The minimum latch current can be controlled by specific SCR design. The HHI-SCR is demonstrated in a 0.10 μm-CMOS and in a 0.4 μm-BiCMOS technology. The design is area efficient.
ISSN:0026-2714
1872-941X
DOI:10.1016/S0026-2714(03)00125-2