Monte Carlo simulation of multiple and plural scattering in elastic recoil detection

In heavy ion elastic recoil detection measurements, the multiple and plural scattering of in-going primary ions and out-coming recoiled atoms introduces a major problem for a reliable and accurate analysis of concentration distributions in samples. In this study, a Monte Carlo (MC) code including mu...

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Bibliographic Details
Published in:	Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 174; no. 1; pp. 163 - 172
Main Authors:	Arstila, K, Sajavaara, T, Keinonen, J
Format:	Journal Article
Language:	English
Published:	Elsevier B.V 01-03-2001
Subjects:	Monte Carlo simulations Multiple and plural scattering TOF-ERDA TOF-ERDA 02.70.Lq Monte Carlo simulations 61.18.Bn 07.05.Tp Multiple and plural scattering
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Summary:	In heavy ion elastic recoil detection measurements, the multiple and plural scattering of in-going primary ions and out-coming recoiled atoms introduces a major problem for a reliable and accurate analysis of concentration distributions in samples. In this study, a Monte Carlo (MC) code including multiple and plural scattering has been developed for simulation of elastic recoil detection energy spectra. Simulated spectra are in a good agreement with experimental spectra. The influence of the multiple or plural scattering on the energy spectra is discussed. Applications of the MC approach in elastic recoil detection analysis are considered.
ISSN:	0168-583X 1872-9584
DOI:	10.1016/S0168-583X(00)00435-3