Characterization and Optimization of Thermally Grown Iridium Oxide and Its Application to pH Sensors
In this study, we evaluate the thermal oxidization methods of iridium to simplify the fabrication of Ir/IrOx pH microsensors. Iridium oxide (IrOx) is a typical pH-sensing material. Specifically, three parameters of the previously reported “carbonate-melt” method are modified, namely, the oxidization...
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| Published in: | Sensors and materials Vol. 30; no. 5(2); p. 1175 |
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| Main Authors: | , , , , , , |
| Format: | Journal Article |
| Language: | English |
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Tokyo
MYU Scientific Publishing Division
2018
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| Abstract | In this study, we evaluate the thermal oxidization methods of iridium to simplify the fabrication of Ir/IrOx pH microsensors. Iridium oxide (IrOx) is a typical pH-sensing material. Specifically, three parameters of the previously reported “carbonate-melt” method are modified, namely, the oxidization temperature, oxidization time, and annealing process after oxidization. Then, we compare the characteristics of the fabricated sensors (i.e., the initial pH responsivity, time required to reach the steady state, and potential drift). The pH response depends on the oxidization temperature and time. |
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| AbstractList | In this study, we evaluate the thermal oxidization methods of iridium to simplify the fabrication of Ir/IrOx pH microsensors. Iridium oxide (IrOx) is a typical pH-sensing material. Specifically, three parameters of the previously reported “carbonate-melt” method are modified, namely, the oxidization temperature, oxidization time, and annealing process after oxidization. Then, we compare the characteristics of the fabricated sensors (i.e., the initial pH responsivity, time required to reach the steady state, and potential drift). The pH response depends on the oxidization temperature and time. |
| Author | Miyahara, Yuji Matsumoto, Akira Goda, Tatsuro Tabata, Miyuki Sriyudthsak, Mana Ratanaporncharoen, Chindanai Watanagool, Natthapol |
| Author_xml | – sequence: 1 givenname: Chindanai surname: Ratanaporncharoen fullname: Ratanaporncharoen, Chindanai – sequence: 2 givenname: Miyuki surname: Tabata fullname: Tabata, Miyuki – sequence: 3 givenname: Natthapol surname: Watanagool fullname: Watanagool, Natthapol – sequence: 4 givenname: Tatsuro surname: Goda fullname: Goda, Tatsuro – sequence: 5 givenname: Akira surname: Matsumoto fullname: Matsumoto, Akira – sequence: 6 givenname: Mana surname: Sriyudthsak fullname: Sriyudthsak, Mana – sequence: 7 givenname: Yuji surname: Miyahara fullname: Miyahara, Yuji |
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| Snippet | In this study, we evaluate the thermal oxidization methods of iridium to simplify the fabrication of Ir/IrOx pH microsensors. Iridium oxide (IrOx) is a typical... |
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| Title | Characterization and Optimization of Thermally Grown Iridium Oxide and Its Application to pH Sensors |
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