Characterization and Optimization of Thermally Grown Iridium Oxide and Its Application to pH Sensors

Characterization and Optimization of Thermally Grown Iridium Oxide and Its Application to pH Sensors

In this study, we evaluate the thermal oxidization methods of iridium to simplify the fabrication of Ir/IrOx pH microsensors. Iridium oxide (IrOx) is a typical pH-sensing material. Specifically, three parameters of the previously reported “carbonate-melt” method are modified, namely, the oxidization...

Full description

Saved in:
Bibliographic Details
Published in:Sensors and materials Vol. 30; no. 5(2); p. 1175
Main Authors: Ratanaporncharoen, Chindanai, Tabata, Miyuki, Watanagool, Natthapol, Goda, Tatsuro, Matsumoto, Akira, Sriyudthsak, Mana, Miyahara, Yuji
Format: Journal Article
Language:English
Published: Tokyo MYU Scientific Publishing Division 2018
Subjects:
Iridium
Parameter modification
Sensors
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:In this study, we evaluate the thermal oxidization methods of iridium to simplify the fabrication of Ir/IrOx pH microsensors. Iridium oxide (IrOx) is a typical pH-sensing material. Specifically, three parameters of the previously reported “carbonate-melt” method are modified, namely, the oxidization temperature, oxidization time, and annealing process after oxidization. Then, we compare the characteristics of the fabricated sensors (i.e., the initial pH responsivity, time required to reach the steady state, and potential drift). The pH response depends on the oxidization temperature and time.
ISSN:0914-4935
DOI:10.18494/SAM.2018.1733