Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer
We describe microgravity generation and the resolution evaluation results of a sub-1-mG microelectromechanical system (MEMS) accelerometer (1 G = 9.8 m/s2). To realize input acceleration below 1 mG, we show the principle of generating microgravity acceleration by adjusting the tilt angle. The change...
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| Published in: | Sensors and materials Vol. 30; no. 12; p. 2919 |
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| Main Authors: | , , , , , , , , |
| Format: | Journal Article |
| Language: | English |
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Tokyo
MYU Scientific Publishing Division
01-01-2018
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| Abstract | We describe microgravity generation and the resolution evaluation results of a sub-1-mG microelectromechanical system (MEMS) accelerometer (1 G = 9.8 m/s2). To realize input acceleration below 1 mG, we show the principle of generating microgravity acceleration by adjusting the tilt angle. The change in acceleration induced by a tilting board is quantitatively analyzed, and the capacitance change of the MEMS accelerometer as a function of tilt angle is measured. The analytical results show that the tilting board has the potential to generate microgravity. The experimental results reveal that the sub-1-mG MEMS accelerometer can realize the detection of sub-1-mG-level acceleration. |
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| AbstractList | We describe microgravity generation and the resolution evaluation results of a sub-1-mG microelectromechanical system (MEMS) accelerometer (1 G = 9.8 m/s2). To realize input acceleration below 1 mG, we show the principle of generating microgravity acceleration by adjusting the tilt angle. The change in acceleration induced by a tilting board is quantitatively analyzed, and the capacitance change of the MEMS accelerometer as a function of tilt angle is measured. The analytical results show that the tilting board has the potential to generate microgravity. The experimental results reveal that the sub-1-mG MEMS accelerometer can realize the detection of sub-1-mG-level acceleration. |
| Author | Takayasu, Motohiro Ito, Hiroyuki Konishi, Toshifumi Masu, Kazuya Dosho, Shiro Tsuji, Ippei Yamane, Daisuke Machida, Katsuyuki Ishihara, Noboru |
| Author_xml | – sequence: 1 givenname: Motohiro surname: Takayasu fullname: Takayasu, Motohiro – sequence: 2 givenname: Ippei surname: Tsuji fullname: Tsuji, Ippei – sequence: 3 givenname: Hiroyuki surname: Ito fullname: Ito, Hiroyuki – sequence: 4 givenname: Daisuke surname: Yamane fullname: Yamane, Daisuke – sequence: 5 givenname: Shiro surname: Dosho fullname: Dosho, Shiro – sequence: 6 givenname: Toshifumi surname: Konishi fullname: Konishi, Toshifumi – sequence: 7 givenname: Noboru surname: Ishihara fullname: Ishihara, Noboru – sequence: 8 givenname: Katsuyuki surname: Machida fullname: Machida, Katsuyuki – sequence: 9 givenname: Kazuya surname: Masu fullname: Masu, Kazuya |
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| Snippet | We describe microgravity generation and the resolution evaluation results of a sub-1-mG microelectromechanical system (MEMS) accelerometer (1 G = 9.8 m/s2). To... |
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| SubjectTerms | Acceleration Accelerometers Microelectromechanical systems Microgravity |
| Title | Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer |
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