Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer

We describe microgravity generation and the resolution evaluation results of a sub-1-mG microelectromechanical system (MEMS) accelerometer (1 G = 9.8 m/s2). To realize input acceleration below 1 mG, we show the principle of generating microgravity acceleration by adjusting the tilt angle. The change...

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Bibliographic Details
Published in:	Sensors and materials Vol. 30; no. 12; p. 2919
Main Authors:	Takayasu, Motohiro, Tsuji, Ippei, Ito, Hiroyuki, Yamane, Daisuke, Dosho, Shiro, Konishi, Toshifumi, Ishihara, Noboru, Machida, Katsuyuki, Masu, Kazuya
Format:	Journal Article
Language:	English
Published:	Tokyo MYU Scientific Publishing Division 01-01-2018
Subjects:	Acceleration Accelerometers Microelectromechanical systems Microgravity
Online Access:	Get full text
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Summary:	We describe microgravity generation and the resolution evaluation results of a sub-1-mG microelectromechanical system (MEMS) accelerometer (1 G = 9.8 m/s2). To realize input acceleration below 1 mG, we show the principle of generating microgravity acceleration by adjusting the tilt angle. The change in acceleration induced by a tilting board is quantitatively analyzed, and the capacitance change of the MEMS accelerometer as a function of tilt angle is measured. The analytical results show that the tilting board has the potential to generate microgravity. The experimental results reveal that the sub-1-mG MEMS accelerometer can realize the detection of sub-1-mG-level acceleration.
ISSN:	0914-4935
DOI:	10.18494/SAM.2018.1840