Deposition of Silicon Nitride Films by Microwave Glow Discharge

Deposition of Silicon Nitride Films by Microwave Glow Discharge

Saved in:
Bibliographic Details
Published in:Japanese Journal of Applied Physics Vol. 12; no. 2; pp. 309 - 310
Main Authors: Shima, Yasuji, Miyazaki, Takao, Nakamura, Nobuo, Adachi, Eiichi, Tokuyama, Takashi
Format: Journal Article
Language:English
Published: 01-01-1973
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.12.309