Reflectance measurements and optical constants in the extreme ultraviolet of thin films of ion-beam-deposited carbon

• Published in: Optics communications Vol. 183; no. 5; pp. 437 - 443
• Main Authors: Larruquert, Juan I, Keski-Kuha, Ritva A.M
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 15-09-2000; Elsevier Science
• Subjects: Carbon films; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Exact sciences and technology; Extreme UV radiation; Far UV radiation; Fundamental areas of phenomenology (including applications); Optical constants; Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity); Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity; Optical materials; Optical properties; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation; Optical properties of bulk materials and thin films; Optics; Physics; Reflectivity; Thin films; Thin films; Reflectivity; Optical properties; Far UV radiation; Carbon films; Extreme UV radiation; Optical constants; Coating material; Optical materials; Experimental study; Extreme ultraviolet radiation; Carbon; Reflectance
• ISSN: 0030-4018; 1873-0310
• DOI: 10.1016/S0030-4018(00)00884-1

Reflectance measurements of ion-beam-deposited (IBD) C films were performed in the extreme ultraviolet (EUV) spectral region from 49 to 200 nm. Near normal incidence reflectance of IBD C films was determined to be higher than that of evaporated C films but lower than that of diamond. Optical constants of IBD C films were obtained from reflectance measurements as a function of the angle of incidence in the spectral range 49.0–121.6 nm. The relatively high reflectance of IBD C films in the spectral region 49–92 nm and its stability when stored in a desiccator make it an interesting coating material for the EUV.