Growth of ZnO-Nanorod Grating on the Seed Grating Produced by Femtosecond Laser Pulses

In this research, we successfully fabricated ZnO-nanorod grating by carrying out femtosecond-laser modification of the seed layer. First, a Ag-doped ZnO seed layer was deposited on a glass substrate by dc/rf magnetron co-sputtering, in which rf and dc power sources were utilized for the ZnO and the...

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Bibliographic Details
Published in:	Japanese Journal of Applied Physics Vol. 49; no. 10; pp. 105001 - 105001-5
Main Authors:	Lee, Geon Joon, Nam, Hyun Jung, Hwangbo, Chang Kwon, Lim, Hyunjin, Cheong, Hyeonsik, Kim, Hee Soo, Yoon, Chong Seung, Min, Sun-Ki, Han, Sung-Hwan, Lee, YoungPak
Format:	Journal Article
Language:	English
Published:	The Japan Society of Applied Physics 01-10-2010
Online Access:	Get full text
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Summary:	In this research, we successfully fabricated ZnO-nanorod grating by carrying out femtosecond-laser modification of the seed layer. First, a Ag-doped ZnO seed layer was deposited on a glass substrate by dc/rf magnetron co-sputtering, in which rf and dc power sources were utilized for the ZnO and the Ag targets, respectively. Next, a seed grating was produced on the seed layer by using the two-beam interference of femtosecond-laser pulses. Finally, a ZnO-nanorod grating was grown on the seed grating by chemical bath deposition in an aqueous solution of Zn(NO 3 ) 2 and hexamethyltetramine. The scanning-electron-microscopy images indicate that the ZnO-nanorod grating can be regarded as a spatially periodic structure consisting of alternating bands of ZnO nanorods with relatively large and small diameters. The selected-area electron-diffraction patterns of the seed grating reveal that the formation of the ZnO-nanorod grating is attributable to the spatially selective modification of the seed layer produced by femtosecond-laser pulses.
Bibliography:	(Color online) (a) Absorption spectra and (b) XRD pattern of the ZnO:Ag seed layers prepared by co-sputtering of the ZnO and the Ag targets. The inset in (a) shows the absorption spectrum of the pure ZnO film. (Color online) (a) Plan-view SEM micrographs of the ZnO-nanorod film grown on the uniform seed layer by the chemical bath deposition. (b) Plan-view SEM micrograph of the seed layer before the growth of ZnO nanorods. (Color online) (a) XRD pattern, (b) absorption spectrum, and (c) PL spectrum of the ZnO-nanorod film grown on the uniform seed layer by the chemical bath deposition. The inset in (b) shows the absorption spectrum of pure ZnO film. The bottom part of (c) shows the PL spectrum of the seed layer. (Color online) Spatial intensity distribution of the dipole emission inside and outside the ZnO nanorod. In the map, the spatial intensity distribution is plotted on a logarithmic scale. Rod length = 1000 nm, and rod diameter = 100 nm. (Color online) Plan-view SEM micrographs of the ZnO-nanorod grating grown on the seed grating by the chemical bath deposition. The seed grating was produced on the ZnO:Ag film by using the two-beam interference of femtosecond-laser pulses. (Color online) (a) Plan-view TEM micrograph for the seed grating, and indexed ED patterns from (b) the bright band and (c) the dark one of the seed grating. (d) Plan-view TEM micrograph and (e) the corresponding ED pattern of the uniform seed layer. a 1 : ZnO(100), a 2 : ZnO(002), a 3 : ZnO(102), a 4 : ZnO(110), a 5 : ZnO(200), b 1 : Ag(111), b 2 : Ag(200), and b 3 : Ag(220). (Color online) XRD patterns of the ZnO-nanorod films grown on the as-deposited and the annealed seed layers.
ISSN:	0021-4922 1347-4065
DOI:	10.1143/JJAP.49.105001