Quasi-monolithic heat flux microsensor based on porous silicon boxes

A new generation of heat flux microsensors manufactured in CMOS silicon technology with high sensitivities is presented. Incident heat flux is converted into periodic superficial temperature gradients by an array of porous silicon boxes processed onto the substrate. A planar thermopile built up of d...

Full description

Saved in:

Bibliographic Details
Published in:	Sensors and actuators. A. Physical. Vol. 164; no. 1; pp. 35 - 40
Main Authors:	Ziouche, Katir, Godts, Pascale, Bougrioua, Zahia, Sion, Charles, Lasri, Tuami, Leclercq, Didier
Format:	Journal Article
Language:	English
Published:	Elsevier B.V 01-11-2010 Elsevier
Subjects:	Arrays Devices Engineering Sciences Heat flux Heat flux measurement Heat transfer Polysilicon thermopile Porous silicon Sensors Thermal conductivity Thermal microsensor Thermocouples Polysilicon thermopile Thermal microsensor Porous silicon Heat flux measurement
Online Access:	Get full text
Tags:	Add Tag No Tags, Be the first to tag this record!

Be the first to leave a comment!